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Adding Semiconductor Equipment (SECS/GEM)
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The SECS/GEM driver connects to equipment as a GEM host over HSMS (SEMI E37).
Settings
Connection fields: IP Address and Port (default 5000) of the equipment's HSMS port. The rest goes in driverConfig through Advanced Driver Settings:
json
{
"driverConfig": {
"session_id": 1,
"mode": "active",
"svids": [1001, 1002, 1010],
"ceids": [200, 201],
"event_reports": { "200": [1001, 1002] },
"t3": 45, "t5": 10, "t6": 5, "t7": 10
}
}| Key | Meaning | Default |
|---|---|---|
session_id | HSMS session (device) ID, must match the equipment | 1 |
mode | active: host opens the TCP connection. passive: equipment connects in. | active |
svids | Status variables to read | [] |
ceids | Collection events to enable (S2F33 + S2F35 + S2F37) | [] |
event_reports | {ceid: [svid, ...]} — status/data variables to attach to a CEID's report | {} |
t3, t5, t6, t7 | HSMS timeouts in seconds | 45, 10, 5, 10 |
A CEID with no entry in event_reports is subscribed with an empty report. Most equipment refuses to enable that — SEMI E30 treats a report with no data values as a request to delete it, so linking and enabling fail. Give every CEID you list in ceids a matching event_reports entry (a real equipment constant or status variable ID it's allowed to report — check the equipment's SECS/GEM interface manual). The driver log names the CEID and the SEMI ack code (DRACK/LRACK/ERACK) when a subscription is rejected.
Tags
| Path | Source |
|---|---|
SV/<name> | Status variable, read with S1F3 on every poll. The name comes from the equipment's S1F11 answer, or SV_<svid>. |
Event/<CEID_n> | true after the collection event arrives. |
Event/<CEID_n>/<dv name> | Report data from the event — populated only for CEIDs with an event_reports entry. |
Alarm/<alid>, Alarm/<alid>/text | Alarm set state and text (S5F1). |
Browse Tags lists known status variables plus any events and alarms received so far.
Writes
| Path | Sends |
|---|---|
ECV/<ecid> | S2F15 new equipment constant |
RCMD/<command> | S2F41 host command (without parameters from the tag write UI) |